NEW ISP-90 Dry Scroll Vacuum Pump


idp-90 dry scroll vacuum pump, oiless, varian

The ISP-90 Dry Scroll Vacuum Pump is a compact pump well suited for many applications where clean oil-free operation is required. This pump has an ultimate vacuum of 3.7 x 10-2 Torr and a pumping speed of 6.5 m3/hr (at 60Hz). It can be used as a dry pump option with the PELCO easiGlow™ Glow Discharge Cleaning System.

The ISP-90 is suitable for clean processes only. It should not be used with explosive, flammable, toxic, or corrosive substances or substances that contain chemicals, solvents, or particles.

Dry Scroll Vacuum Pumps Technical Specifications

 

  IDP-3 ISP-90
Peak Pumping Speed (60Hz) 60L/m, 3.6m3/hr, 2.1 cfm 108L/m, 6.5m3/hr, 3.2 cfm
Peak Pumping Speed (50Hz) 50L/m, 3.0m3/hr, 1.8 cfm 90L/m, 5.4m3/hr, 3.8 cfm
Ultimate Pressure 2.5 x 10-1 Torr (3.3 x 10-1 mbar) 3.7 x 10-2 Torr (4.9 x 10-2 mbar)
Inlet Connection NW16 KF flange NW25
Exhaust Connection 1/4 in. female nat'l pipe thread
(10mm hose barb provided)
NW16
Gas Ballast Connection 1/8 in. female nat'l pipe thread Rc 1/8
Ambient Operation Temperature 5 to 45°C (41 to 113°F) 5 to 40°C (41 to 104°F)
Motor Rating 0.16 horsepower (0.12 kW) 0.20 horsepower (0.15 kW)
Supply Power 1 phase, 50-60 Hz,
100-115/200-240 VAC
1 phase, 50-60 Hz,
100-115/200-230 VAC
Motor Thermal Protection Automatic Automatic
Rotation Speed 3200 RPM at 60 Hz
2600 RPM at 50 Hz
1430 RPM at 60 Hz
1740 RPM at 50 Hz
Cooling Air-cooled Air-cooled
Noise ≤55 ≦52
Weight 9.5 kg (21 lbs) 14 kg (31 lbs)
Size 384 x 140 x 181mm (LxWxH)
15.12" x 5.51 x 7.13"
308 x 214 x 225mm (LxWxH)
12.13" x 8.43 x 8.86"
Restrictions No corrosive, explosive, or particulate-forming gases No corrosive, explosive, or particulate-forming gases
Leak Rate (exhaust sealed) <1 x 10-6 std-cc/sec helium 1.0 x 10-5 Pa*m3/s
Compliances CE, CSA, CSA/CUS, Semi S2-703, and RoHS CE, cTUV





exhaust filter for 7010 and GD6 vacuum pumps

 

Large Anti-Vibration Pads for Vacuum Pumps

Anti-vibration pads to be placed under vacuum pumps to dampen vibration. Soft closed-cell foam mat made of a blend of Buna-N, neoprene, and vinyl. Oil resistant and flame retardant.

Pad Dimensions: 15 x 8 x 0.5" (38.1 x 20.3 x 1.3cm)