
The ISP-90 Dry Scroll Vacuum Pump is a compact pump well suited for many applications where clean oil-free operation is required. This pump has an ultimate vacuum of 3.7 x 10-2 Torr and a pumping speed of 6.5 m3/hr (at 60Hz). It can be used as a dry pump option with the PELCO easiGlow™ Glow Discharge Cleaning System.
The ISP-90 is suitable for clean processes only. It should not be used with explosive, flammable, toxic, or corrosive substances or substances that contain chemicals, solvents, or particles.
| IDP-3 | ISP-90 | |
| Peak Pumping Speed (60Hz) | 60L/m, 3.6m3/hr, 2.1 cfm | 108L/m, 6.5m3/hr, 3.2 cfm |
| Peak Pumping Speed (50Hz) | 50L/m, 3.0m3/hr, 1.8 cfm | 90L/m, 5.4m3/hr, 3.8 cfm |
| Ultimate Pressure | 2.5 x 10-1 Torr (3.3 x 10-1 mbar) | 3.7 x 10-2 Torr (4.9 x 10-2 mbar) |
| Inlet Connection | NW16 KF flange | NW25 |
| Exhaust Connection | 1/4 in. female nat'l pipe thread (10mm hose barb provided) |
NW16 |
| Gas Ballast Connection | 1/8 in. female nat'l pipe thread | Rc 1/8 |
| Ambient Operation Temperature | 5 to 45°C (41 to 113°F) | 5 to 40°C (41 to 104°F) |
| Motor Rating | 0.16 horsepower (0.12 kW) | 0.20 horsepower (0.15 kW) |
| Supply Power | 1 phase, 50-60 Hz, 100-115/200-240 VAC |
1 phase, 50-60 Hz, 100-115/200-230 VAC |
| Motor Thermal Protection | Automatic | Automatic |
| Rotation Speed | 3200 RPM at 60 Hz 2600 RPM at 50 Hz |
1430 RPM at 60 Hz 1740 RPM at 50 Hz |
| Cooling | Air-cooled | Air-cooled |
| Noise | ≤55 | ≦52 |
| Weight | 9.5 kg (21 lbs) | 14 kg (31 lbs) |
| Size | 384 x 140 x 181mm (LxWxH) 15.12" x 5.51 x 7.13" |
308 x 214 x 225mm (LxWxH) 12.13" x 8.43 x 8.86" |
| Restrictions | No corrosive, explosive, or particulate-forming gases | No corrosive, explosive, or particulate-forming gases |
| Leak Rate (exhaust sealed) | <1 x 10-6 std-cc/sec helium | 1.0 x 10-5 Pa*m3/s |
| Compliances | CE, CSA, CSA/CUS, Semi S2-703, and RoHS | CE, cTUV |
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Large Anti-Vibration Pads for Vacuum PumpsAnti-vibration pads to be placed under vacuum pumps to dampen vibration. Soft closed-cell foam mat made of a blend of Buna-N, neoprene, and vinyl. Oil resistant and flame retardant. Pad Dimensions: 15 x 8 x 0.5" (38.1 x 20.3 x 1.3cm) |