Zapotec

High Resolution Sputter Coater

The Agar high resolution sputter coater offers a real solution to the problems encountered when coating difficult samples for FEG SEM imaging.

The Agar high resolution sputter coater offers a real solution to the problems encountered when coating difficult samples for FEG SEM imaging. To minimise the effect of grain size, the coater gives full control over thickness and deposition conditions. The turbomolecular drag pump provides the high vacuum necessary for sputtering non-noble metals, while having excellent gas handling characteristics. The magnetron sputtering head has the high current capability required for sputtering chromium and a source shutter for target conditioning is provided as standard.

 

The rotary planetary stage with tilt ensures that highly contoured samples are evenly coated. This ensures that the minimum coating thickness can be applied to give conductivity without compromising fine specimen detail. The dual height 150mm diameter work chamber gives easy adjustment of working distance.

 

The integrated terminating film thickness monitor allows the coating thickness to be closely controlled and reproduced for repeat samples.

Sputter head Low voltage planar magnetron type with quick target change. Wrap-around dark-space shield
Sputter target ø 57mm. Optional Cr, Ta, Au, Au/Pd, Pt, W, Ir, Ag. Shutter for target conditioning included standard.
Sputter supply Programmable digital control, microprocessor based, safety interlocked, current control independent of vacuum, 80mA max.
Sample table Motorised Rotary Planetary stage with manual tilt (standard)
Analogue metering Vacuum: atmosphere - 0.001mb, current: 0 - 100mA
Dimensions (W x D x H) 600mm x 600mm x 450mm
Weight 40kg
Power 550 VA max.
Pumping system speed 300 litres/min @ 0.1mb
Benchtop system Vacuum pump is mounted on a benchtop compatible anti-vibration table with stainless steel bellows coupling system

AGB7367A Technical Datasheet AGB7234 Technical Data

Specifications
Chamber size 150mm dia x 250mm high
  150mm dia x 165mm high
Sputter target ø 57mm. Optional Cr, Ta, Au, Au/Pd, Pt, W, Ir, Ag 
  Shutter for target conditioning included standard. 
Sample table Motorised Rotary Planetary stage with manual tilt (standard) 
  Manual tilt 0 - 90° 
  Variable speed rotation
  4 sample tables delivered standard (specify when ordering)
Sputter supply Programmable digital control, microprocessor-based 
  Safety interlocked
  Current control independent of vacuum, 80mA max
Sputter head Low voltage planar magnetron type with quick target change 
  Wrap-around dark-space shield 
Analogue metering Vacuum: atmosphere - 0.001mb
  Current: 0 - 100mA
Control method Automatic operation of gas purge and leak functions
  Independent power/pressure adjustment allows operation at argon gas pressure ranges of 0.2 - 0.005mbar 
  Automatic process sequencing
  Full manual override
  Digital timer (0-300 sec) with pause
  Automatic vent
Thickness monitoring Film Thickness Monitor for Agar SEM Turbo Coater (AGB7240) included standard 
Dimensions Width 600mm (23.6"), Depth 600mm (23.6"), Height 450mm (17.7") 
Weight 40kg
Power consumption 550VA max. 
Pumping System
Configuration Turbo-drag/rotary pump combination. Optional diaphragm pump instead of rotary pump
Pumping speed 300 litres/min @ 0.1mb 
Pump downtime 1 min. to 1x10-3mb (1.5 min. with diaphragm pump option) 
Ultimate pressure 1x10-5 mBar 
Benchtop system The vacuum pump is mounted on a benchtop compatible anti-vibration table with stainless steel bellows coupling system
Services required
Supply 100 – 120 or 200 – 240VAC, 50/60Hz (to be specified on order)
Power 175VA max.
Argon Gas Purity min. 99.9%
  Pressure: regulated 7 – 8 psi (0.5 – 0.6 bar)
  Hose connection: 6.0mm (1/4”)
Thickness Monitors (optional)
General specification Microprocessor-based
  4 digit display, push-button zero
  6MHz crystal with lifetime check
  5/sec update rate
Thickness range 0nm to 999.9nm
Resolution Better than 0.1nm
Density range 0.50-30.00gm/cm3
Tooling factor range 0.25-8.0
Termination range 0nm to 999.9nm