High Resolution Sputter Coater
The Agar high resolution sputter coater offers a real solution to the problems encountered when coating difficult samples for FEG SEM imaging.
The Agar high resolution sputter coater offers a real solution to the problems encountered when coating difficult samples for FEG SEM imaging. To minimise the effect of grain size, the coater gives full control over thickness and deposition conditions. The turbomolecular drag pump provides the high vacuum necessary for sputtering non-noble metals, while having excellent gas handling characteristics. The magnetron sputtering head has the high current capability required for sputtering chromium and a source shutter for target conditioning is provided as standard.
The rotary planetary stage with tilt ensures that highly contoured samples are evenly coated. This ensures that the minimum coating thickness can be applied to give conductivity without compromising fine specimen detail. The dual height 150mm diameter work chamber gives easy adjustment of working distance.
The integrated terminating film thickness monitor allows the coating thickness to be closely controlled and reproduced for repeat samples.
Sputter head | Low voltage planar magnetron type with quick target change. Wrap-around dark-space shield |
Sputter target | ø 57mm. Optional Cr, Ta, Au, Au/Pd, Pt, W, Ir, Ag. Shutter for target conditioning included standard. |
Sputter supply | Programmable digital control, microprocessor based, safety interlocked, current control independent of vacuum, 80mA max. |
Sample table | Motorised Rotary Planetary stage with manual tilt (standard) |
Analogue metering | Vacuum: atmosphere - 0.001mb, current: 0 - 100mA |
Dimensions (W x D x H) | 600mm x 600mm x 450mm |
Weight | 40kg |
Power | 550 VA max. |
Pumping system speed | 300 litres/min @ 0.1mb |
Benchtop system | Vacuum pump is mounted on a benchtop compatible anti-vibration table with stainless steel bellows coupling system |
Specifications | |
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Chamber size | 150mm dia x 250mm high |
150mm dia x 165mm high | |
Sputter target | ø 57mm. Optional Cr, Ta, Au, Au/Pd, Pt, W, Ir, Ag |
Shutter for target conditioning included standard. | |
Sample table | Motorised Rotary Planetary stage with manual tilt (standard) |
Manual tilt 0 - 90° | |
Variable speed rotation | |
4 sample tables delivered standard (specify when ordering) | |
Sputter supply | Programmable digital control, microprocessor-based |
Safety interlocked | |
Current control independent of vacuum, 80mA max | |
Sputter head | Low voltage planar magnetron type with quick target change |
Wrap-around dark-space shield | |
Analogue metering | Vacuum: atmosphere - 0.001mb |
Current: 0 - 100mA | |
Control method | Automatic operation of gas purge and leak functions |
Independent power/pressure adjustment allows operation at argon gas pressure ranges of 0.2 - 0.005mbar | |
Automatic process sequencing | |
Full manual override | |
Digital timer (0-300 sec) with pause | |
Automatic vent | |
Thickness monitoring | Film Thickness Monitor for Agar SEM Turbo Coater (AGB7240) included standard |
Dimensions | Width 600mm (23.6"), Depth 600mm (23.6"), Height 450mm (17.7") |
Weight | 40kg |
Power consumption | 550VA max. |
Pumping System | |
Configuration | Turbo-drag/rotary pump combination. Optional diaphragm pump instead of rotary pump |
Pumping speed | 300 litres/min @ 0.1mb |
Pump downtime | 1 min. to 1x10-3mb (1.5 min. with diaphragm pump option) |
Ultimate pressure | 1x10-5 mBar |
Benchtop system | The vacuum pump is mounted on a benchtop compatible anti-vibration table with stainless steel bellows coupling system |
Services required | |
Supply | 100 – 120 or 200 – 240VAC, 50/60Hz (to be specified on order) |
Power | 175VA max. |
Argon Gas | Purity min. 99.9% |
Pressure: regulated 7 – 8 psi (0.5 – 0.6 bar) | |
Hose connection: 6.0mm (1/4”) | |
Thickness Monitors (optional) | |
General specification | Microprocessor-based |
4 digit display, push-button zero | |
6MHz crystal with lifetime check | |
5/sec update rate | |
Thickness range | 0nm to 999.9nm |
Resolution | Better than 0.1nm |
Density range | 0.50-30.00gm/cm3 |
Tooling factor range | 0.25-8.0 |
Termination range | 0nm to 999.9nm |