Zapotec

Manual Sputter Coater for SEM

An easy-to-use basic sputter coater for gold coating of SEM specimens.

This is a easy-to-use basic instrument for gold coating of SEM specimens. It has fully variable current control, a digital process timer with pause option, a variable height specimen table, a hinged top plate and an O-ring sealed vacuum chamber. The control allows the sputter current to be set independently of the gas pressure, which is adjusted separately by a manual leak valve. Coverage and grain size are optimised for any specimen. The cool magnetron type head with 57mm diameter target gives efficient sputtering with minimal heating. Coating time is set by a timer with a digital readout and stored in the memory. The vacuum status and sputter current are displayed on the panel meter.

 

A modular desktop design combines sputter control unit, pumping system and thickness monitor into an area of only 400 x 600mm. It is fully integrated using a quick release all-metal coupling system. The adjustable height specimen table will accept up to 12 pin type stubs or can be used as a platform for other types of stubs and specimens. A vacuum feed through is provided for the optional film thickness monitor.

 

Chamber size: 120 x 120mm

Sputter head Low voltage planar magnatron
Sputter target Gold fitted as standard (Au/Pd or Pt optional)
Sputter supply Holds 12 SEM ½" stubs
Analogue metering Vacuum, Atm - 0.001mb
Dimensions (W x D x H) 420 x 295 x 287mm
Weight 10kg
Power 40VA max (excluding rotary pump)
Pumping system speed 2.5/3.0m3/hr (50/60Hz)
Desktop system Vacuum pump is mounted on desktop compatible anti-vibration table
Pumping system dimensions (W x D x H) 330 x 215 x 210mm (H 270mm with filter)
Pumping system weight 15kg
Pumping system power 130VA
Services required Argon gas: purity, min. 99.9%

Sputter head Low voltage planar magnatron
Sputter target Gold fitted as standard (Au/Pd or Pt optional)
Sputter supply Holds 12 SEM ½" stubs
Analogue metering Vacuum, Atm - 0.001mb
Dimensions (W x D x H) 420 x 295 x 287mm
Weight 10kg
Power 40VA max (excluding rotary pump)
Pumping system speed 2.5/3.0m3/hr (50/60Hz)
Desktop system Vacuum pump is mounted on desktop compatible anti-vibration table
Pumping system dimensions (W x D x H) 330 x 215 x 210mm (H 270mm with filter)
Pumping system weight 15kg
Pumping system power 130VA
Services required Argon gas: purity, min. 99.9%