Zapotec

SEM Automatic Carbon Coater

The Agar automatic SEM carbon coater is a dedicated unit for routine coating of SEM and microprobe samples, where a conductive low atomic number coating is required.

The Agar automatic SEM carbon coater is a dedicated unit for routine coating of SEM and microprobe samples, where a conductive low atomic number coating is required. The dual carbon rod source with unique current feedback control gives highly reproducible carbon coatings. In automatic mode, the required voltage setting and evaporation time can be entered and displayed via the digital programmer. A manual and a pulsed mode for coating heat sensitive samples are also included. The adjustable height specimen table allows the working distance to be changed.

 

Where an accurate determination of coating thickness is required, the manual film thickness monitor, AGB7348, can be used with this coating unit and a vacuum feedthrough is included for this purpose. Chamber size: 120mm dia x 120mm

 

The AGB7367SE Carbon Coater has the same technical specifications as the standard AGB7367A Auto Carbon Coater but with a larger 150mm diameter chamber which will accommodate the optional Rotary Tilting Stage or Rotary Planetary Tilting Stage. Chamber size: 150mm dia x 165mm.

Chamber size 120mm Ø x 120mm high
Evaporation source Bradley type (6.15mm Ø rods), heavy duty stainless steel construction
Sample table Holds 12 SEM ½" stubs, height adjustment through 60mm
Weight 14kg
Diemnsions (W x D x H) 420 x 295 x 287mm
Power 800 VA max
Rotary pump High speed, direct drive 2-stage, pumpdown time to 0.1mb is 20/25 seconds
Desktop system Vacuum pump is mounted on desktop compatible anti-vibration table, all metal vacuum coupling system
Vacuum pump dimensions 330 x 215 x 210mm (H 270mm with filter)
Vacuum pump weight 15kg
Vacuum pump power 130VA

AGB7367A Technical Datasheet AGB7367A Technical Datasheet

Chamber size 120mm dia x 120mm high (4.75" x 4.75") 
Evaporation source Bradley type (6.15mm dia rods)
Heavy duty stainless steel construction 
Evaporation supply Microprocessor based
Feedback loop controlled with remote current/voltage sensing
Safety interlocked
Variable, 135A max. with over-current protection 
Sample table Holds 12 SEM stubs
Height adjustment through 60mm 
Analogue metering Vacuum, Atm - 0.001mb
Current, 0 - 200A 
Control method Automatic evaporation control using programmed voltage and timer
Full manual override with pulsed or continuous operation
Digital timer, 1 - 30 seconds
Digital voltage setting, 0.1 - 5.5V
Automatic vent 
Thickness monitoring Optional, MTM-10 only 
Dimensions Width 420mm (16.5"), Depth 295mm (11.6"), Height 287mm (11.3")
Weight 14kg (30.9 lbs) 
Power 800 VA max (excluding rotary pump) 
Pumping system
Rotary Pump High speed, direct drive 2-stage 
Pumping speed 3.0/3.6m3/hr (50/60Hz)
Pumpdown time to 0.1mb is 20/25 sec. 
Desktop system Vacuum pump is mounted on desktop compatible anti-vibration table
All metal vacuum coupling system 
Dimensions Width 330mm (13.0"), Depth 215mm (8.5"), Height 210mm (8.3"), 270mm (10.6") with filter 
Weight 15kg (33.2 lbs) 
Power 130VA 
Services required
Supply 200 - 240 VAC, 50/60Hz
Power 930VA max.