SEM Turbo Carbon Coater
High vacuum evaporation of carbon gives the predictable spatial distribution and thickness required for X-ray microanalysis and imaging of non-conductive samples.
High vacuum evaporation of carbon gives the predictable spatial distribution and thickness required for X-ray microanalysis and imaging of non-conductive samples. The high vacuum is achieved by an 80 l/sec turbo molecular pump backed by a rotary pump. In addition to providing a rapid pump down time it has the advantage of not requiring water cooling or a long warm up period. The vacuum is continuously monitored. Carbon is evaporated from the dual shaped carbon rod source with operation in manual, pulsed or automatic modes. Thickness can be monitored by the optional film thickness monitor.
For highly contoured samples the optional motorised rotary planetary stage with tilt greatly increases specimen coverage. The four sample holders are interchangeable and can be configured to suit most types of specimen stubs or metallurgical mounts. Up to 24 pin type stubs can be coated at one time. The stage includes a smaller height work chamber. This allows the working distance to be changed. The long working distance using the standard 150mm diameter x 150mm high chamber with 0° tilt, can be used for even coating of flat polished microprobe samples, while the short working distance with high tilt is used for topographic samples.
This is the most advanced carbon coater with wide applications for TEM, SEM and microprobe techniques. The basic turbo carbon coater can be fitted with different accessories to make it suitable for SEM (with a high vacuum for microprobe or polished substrates, or a low vacuum for coarse or granular substrates), TEM (for support films, shadowing, aperture cleaning, glow discharge, etc.) or both.
The modular design permits rapid change between a variety of applications with optimized operating conditions:
1. Voltage controlled rod source gives multiple evaporation capability
2.Automatic evaporation control gives ease of use in a busy environment
3.Low cost thickness monitor gives reproducible results
4.80 I/sec turbo pump on a 150mm chamber gives very rapid pump down
5.Reduces operating costs by no diffusion pump, no water or liquid nitrogen cooling